AKT 1600 & 4300 Cluster Tools

Have Excess Equipment? Please let us know. We are always willing to purchase or trade for your excess equipment.

- AKT 1600 Gen 2.5 Cluster tool (For generic 400x500mm substrates. Currently configured for common size of 370x470mm.)

• ACL - Atmospheric Cassette Load (Clean Room Robot module)
• Transport module with heater (1) and VCE units (2)
• Aluminum Process Chambers (2) for PVD (sputter)
• Stainless Process Chamber (1) for PVD (sputter)
• Overhead Hoist for maintenance and target and backing plate changes.
• Accessories - Gun-Drilled Backing plates, Various targets and target materials for Lithium Thin-Film Batteries and other applicattions.

AKT 1600 Gen 2.5 Cluster Tool	AKT 1600 Heater	AKT 1600 Main Control Panel	AKT 1600 Main Power Panel	Neslab Dual Channel Heat Exchanger
AKT 1600 4 Cassette Clean Room Load/Unload	AKT 1600 Load/Unload Robot	One of the PVD Process Chambers	Control Box for PVD Proc. Chamber	PVD Power for Proc. Chamber

(Click on images for bigger pictures)

- AKT 4300 Gen 3.5 Cluster tool (For generic 600x720mm substrates.)

• ACL - Atmospheric Cassette Load (Clean Room Robot module)
• Transport module with heater (1) and VCE units (2)
• Stainless Process Chamber (2) for PVD (sputter)
• Overhead Hoist for maintenance and target and backing plate changes.
• Accessories - Gun-Drilled Backing plates, Various targets and target materials for various applicattions.

			Comes with system. No Picture at this time.
AKT 4300 Gen 3.5 Cluster Tool	AKT 4300 Heater	AKT 4300 Main Control Panel	AKT 4300 Main Power Panel	Neslab Dual Channel Heat Exchanger
AKT 4300 4 Cassette Clean Room Load/Unload	AKT 4300 Load/Unload Robot	One of the PVD Process Chambers	Control Box for PVD Proc. Chamber

(Click on images for bigger pictures)