Dover Air Bearing Gantry Systems



Super Precision "H" Configuration

Applications
Optical and Mechanical Inspection,
Pick and Place Assembly
Ultra-fine Probing, Scribing, Laser Machining
- - and many other R&D and Manufacturing operations.

	Workspace = 4-Axis:  650x550x100mm + Theta (in horizontal plane) 
	Motors = Trilogy model LM310 Linear Motors for X & Y, model LM210 for Z 
	Encoders = Heidenhain or Renishaw Equivalent (max clock rate = 8meg/sec)
	Controller = DeltaTau High Performance PMAC, packaged with amps as Dover "DMM-2100" or "DMM-2150"   
	Enclosure = HEPA Filtered, safety interlock switches, with electronic rack spaces around bottom skirt of frame. 

Notes: 
   Originally designed with Lucent Technologies for applications in the Display and Electro-Optics inspection, manufacturing, and testing the emerging "smaller and smaller" asseblies, pixels, and other parts.
   Generally, you can expect to be able to have acceleration exceeding 0.5G, and velocity greater than 1000mm/sec. in both X and Y. The limits of acceleration are the effects of reaction forces and vibration induced into the system.  Structurally, the bearings and motors are capable of much higher accelerations, but for precision tasks, the resulting displacements are impractically great.  Velocity limits are imposed by the amplifiers and by the ability to track encoder counts (8megacounts/sec for Heidenhain interpolators) , not by the mechanics and physics of the gantry design. 
  Of much greater interest is the repeatability and accuracy of motion:  For XY position, you can return to the same encoder position within less than 2 counts.  The ultimate limit on accuracy is temperature stability, and the associated TC's of granite, aluminum and other materials.  Typical encoder count = 0.1micron, however can be larger or smaller according to settings chosen.
   The bases are Rock Of Ages granite surface plates calibrated to micro-inch flatness measurements.  All systems have a 2" pattern of threaded inserts for attaching fixtures, tooling, and work.   
   Enclosures are HEPA filtered in tops, and include safety interlock switches. 
   Many other "goodies" included for your use - Sensors, cameras, modules, fixtures, and so on ........
   On inspection, you will find these systems to be "as-new" because all were used in a clean-room environment, and air bearings are inherently non-contact, thus there is little of no mechanical wear.
      LMDC does not participate in how these systems are installed or used. The buyer is entirely responsible for meeting local worker safety regulations.

X-Axis 550mm (bar of "H")
Yaw 0.8arc-sec, Pitch 3.19arc-sec, Straightness 1.76um, Flatness <5um, Accuracy +/-15-20um,
Accuracy With Compensation +/-5um Over Full Travel / 0.79um +/-1um Over 6" Move / 0.17um,
Position Repeatability <2.54um / 0.39um, Homing Repeatability 0.24um

 

Y-Axis 650mm (Left and Right posts of "H")
Yaw 1.25arc-sec, Pitch 6.01arc-sec, Straightness/Compensation 1.18um,
Flatness <5um, Accuracy +/-15-20um, Accuracy With Compensation +/-5um Over Full Travel / 1.03um +/-1um Over 6" Move.
Position Repeatability 0.63um, Homing Repeatability 0.86um

Z-Axis = 100mm (on X-axis)
Z-Axis Square wrt X-Axis +/-10arc-sec, Z-Axis Square wrt Y-Axis +/-10arc-sec, Accuracy <2.54um,
Homing Repeatability 0.75um
Theta-Axis Rotary Spindle
(shown bolted to Z-axis - axis is vertical)
    Accuracy/Repeatability = 30arc-sec,  Homing Repeatability <15arc-sec.

External Dimensions: 60"x 60"x 80"
Weight: 5000lbs.
Facilities Requirement: 50/60hz AC Power, Clean Dry Air 7CFM

Quantity Available: 10