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Catalogue:
AC Power generators, transfer switches, intercoolers, Micro - turbine
Unique High Performance Cooled CCD Camera for astronomy and other ultra-low noise requirements
Air Bearings - Spindles, Slides, Stages, Systems and Kits
Affymetrix / Molecular Dynamics Laser Confocal Scanning Microscope Mechanism
Anorad Systems, Stages, Controls and Components
Electronics - Components, Test Eq., Power Supplies, Sensors, etc.
Embedded Systems, Processors, Peripherals, and Components
Fiber Communication Splicers, Accessories, Equipment Fitel S175 Splicer
Laboratory & Analytical - Chemical, X-Ray, Physical
Manufacturing - Equipment in Variety, Ultrasonic, Ovens, Presses, ...
Optics & Lasers - Accessories, Lenses, Tables, Mounts, & Misc.
Ovens, Furnaces, Environmental Chambers, Temperature, Humidity
Pulnix TMC-73M Single-Chip Miniature Industrial high quality NTSC camera
Robotics - Commercial Robots, Sensors, PLCC controls, etc.
Stages - Linear, Rotary, n-axis stages & systems of all types.
Servo Components - Amps, Controllers, Motors, Encoders.
Step-Motor - Software, Controllers, Drivers, Kits, Planar, Linear & Rotary Motors, and Complete Systems.
Test Equipment of all types
Vacuum - Systems, Chambers, Pumps, etc. & much equipment
Video - Cameras, Crosshair Gens., Displays, Printers, etc.
Specials:
Pulnix TMC-73M Single Chip Miniature Industrial high quality NTSC camera
LMDC Specials and Deals To Not Pass Up
Sell your Excess Inventory, Materiel, WIP, and Surplus Here
LMDC 3101 Whipple Road, Union City, CA 94587, 510-429-1060, -1065,
(anti-spam) email address: office AT lasermotion DOT com
LMDC Vacuum Equipment
Page
Important Ratios and Constants:
1m3 = 35.32 ft3 = 1000
Liters, 1 torr = 1000 microns = 133 pascals = 1.333 mbar
= 1 mm mercury, 1 Atmosphere = 760 torr = 1013 mbar, 1BTU
= 78.2 ft-lb = 1054.9 Joules
Sputter Systems: Vertical Im-Line, Circular and others
6" Roll to Roll Vacuum Deposition System
Chambers, Vacuum Ovens, Bell Jarsl
Pumps: DRY PUMPS & STACKS, WET PUMPS, OILLESS PUMPS, TURBO PUMPS and CONTROLS, CRYO PUMPS, COMPRESSORS, & LINES
Valves
DC Supplies, AC/RF Supplies
Instruments & Gages
CoAxCables
Mass Flow Sensors and Controls
Just in...
 |
AKT 1600 Gen 2.5 System
- (click for more pictures and discription!)
AKT 1600:- for generic 400x500mm substrates. Currently configured for common size of 370x470mm.
- System Includes:
- ACL - Atmospheric Cassette Load (Clean Room Robot module)
- Transport module with heater (1) and VCE units (2)
- Aluminum Process Chambers (2) for PVD (sputter)
- Stainless Process Chamber (1) for PVD (sputter)
- Overhead Hoist for maintenance and target and backing plate changes.
Accessories: - Gun-Drilled Backing plates, Various targets and target materials for
Lithium Thin-Film Batteries and other applicattions. |
Call for pricing. |
 |
AKT 4300 Gen 3.5 System
- (click for more pictures and discription!)
AKT 4300: - for generic 600x720mm substrates.
- System Includes:
- ACL - Atmospheric Cassette Load (Clean Room Robot module)
- Transport module with heater (1) and VCE units (2)
- Stainless Process Chamber (2) for PVD (sputter)
- Overhead Hoist for maintenance and target and backing plate changes.
Accessories: - Gun-Drilled Backing plates, Various targets and target materials for various applicattions. |
Call for pricing. |
CLUSTER PROCESS TOOLS,
VACUUM WAFER HANDLING ROBOTS
Semiconductor, Flat Panel, Many Other
5", 6", 8", Larger up to 400mm width
MODEL 15800-5
4 sided cluster hub Price $8750
EQUIPE
EFEM 150/200 4 position
Cassette -To-Cassette Manager
with
1 - Equipe Cassette to Chamber robot on linear track
accessing 4 cassette stations.
2 - Equipe Pre-Alginer
Price $40K
CLUSTER HUB, 6 Sided,
200mm,
Includes EQUIPE Robot and Controls.
Price $60K
HEINE
6 side cluster hub, 200mm,
Usable process positions = 4
plus loadlock air-lock LOAD/UNLOAD with two vacuum cassette elevator
stations
in Cleanroom Bulkhead.
Price $25K
SOLAREX - BP SOLAR -
750mm (31" Target ht) Vertical In-Line Dual Sided Sputter System:
Chambers (5 total) LOAD - BUFFER/HEAT/CLEAN - SPUTTER1 - SPUTTER2 - UNLOAD
Volume = 11.59ft3, Internal = H 34.625", W 9", L 64.25"
Slit Valves = 6" x 32"
Doors
Door Openings = 34.625" x 60.5"
Doors = 0.875" x 38"H x 63.625"L
Carriers = 31.5"H x 61"L
Pumps Turbos, Various mechanical pumps, Cryo pumps as shown.
Targets 31" in length
GENUS
Model 8710, 1987, 6" wafer LPCVD / Sputter System 208vac/100A/3phase
removed from production 2003
Model 8720, 1989, 6" wafer Tungsten Silicide LPCVD System 208vac/100A/3phase
removed from production 2003
Vertical In-Line Double-Side Sputter
Coating systems, some of which are examples of the best technology
evolved over about twenty years to meet the extreme requirements
for uniformity and precision in the exquisitely critical disk
manufacturing business (exceeded only by the requirements imposed
by manufacturing optical filters used in multiplexers in optical
fiber communications).
Proven 12-Chamber Silicon PV Panel Manufacturing System
- Actual throughput of 10 MWatts of Amorphous Silicon Photovoltaic Panels/Year
- Process Design by ISEE, Valves by GNB, Chambers by PLD-GNB.
- Designed and built for BP Solar (Solarex) to manufacture 10,000,000 watts of
panels/year
- Panel Size = 2'x 4', or 24"x48".
- Lowest cost/watt, Environment friendly materials.
Save Expense (Stainless now up 400%) and delivery time (about 1 year) to be
up and manufacturing panels for your market.
This is a solidly executed system for coating large (up to 8x5 feet) flat
panels and CVD deposition as of thin-film amorphous Si PV cells.
CORPORATIONS INVOLVED:
Chambers and slit valves by GNB,
System integrated by PLD (now Rohwedder Group). Purchased by Solarex.
Solarex was acquired by BP Solar which, in the usual Corporate
Irony, shut the system down just as the managers thought the process
was working properly. We present, therefore, your opportunity.
WHAT IS INCLUDED
1 Load station (images - Side View, 3/4 View)
12 vacuum chamber stations (images - Inside Top, Inside Bottom, Ch1, Ch2, Ch3, Ch4,
Ch5, Ch6, Ch7, Ch8,
2 atmospheric cooling stations, and
1 unload station. (images -
Two carrier return systems for transporting carriers from the unload area back to the load area
(image -
Gas control cabinets (images -
Carriers 57.5"h x 80" (38) (images -
Festo Pneumatic Manifolds (images -
SPECIFICATIONS (each of 12 chambers):
MAX PANEL SIZE:
using a single chamber as a load lock, max panel size is 96"x 58",
with two chambers, max. panel size is 192"x 58"
CARRIER TRANSPORT IN VACUUM
Two separate carrier transport systems centered 5.25" from inner surfaces of each door, and 11.5" apart.
There are 5 drive pulleys per track in each chamber, spaced 19" apart ,
SUPPLIED CARRIERS:
Usable Area = 57.5"h x 80"w
Overall = 61.5"h x 80"w
Quantity = 38
LOAD STATION - loading of each carrier into the loadlock.
UNLOAD STATION - removal and return of carriers to load station.
SLIT VALVES = 4" x 64" GNB
DOORS:
Door Size = 75.75" x 92"
Door Opening = 68" x 84"
CHAMBERS: Interior: W = 20", H = 67.75", L = 96"
Door-Door W = 22"
Clear of Transport H = 60"
Chamber Material = 304L
Volume each chamber = 90CF
Date Manufactured = 1996 by GNB
LEAK RATE = Better Than 10-9 scc/sec He (standard GNB spec)
PROCESS TRANSPORT = Dual side-by-side transport paths 11.5" apart,
friction drive via pulley on bottom of chamber,
carrier stabilized against roller bearings at top of chamber
Ferrofluid drive feedthroughs through bottom of chamber.
PROCESS GASS MANAGEMENT CABINETS: There are 8 cabinets, each with MFC units
to control the introduction of gases to the process chambers.
CARRIER RETURN: Moving Gantry systems (2) One on each side of cahmber system
COMMENT:
This well constructed chamber system with two paralell transport
paths, 4" x 64" slit valves, excellent leak rate, fully
controllable valves, double sided doors, and large interior width,
is the basis of a production sputter coating system with very
good vacuum and mechanical performance operating in the 0.1-2.0
mTorr range. Substrates as large as 4.5'x 8' or 4.5'x 16' can
theoretically be handled and coated via sputter cathodes.
CATHODE SIZE and COATING SWATH -
With a door opening height of 68", door-mounted cathodes
can be as large as 67", however, for coating uniformity,
the width to be coated would be about 80% of the cathode length,
or 0.8x67"=54".
REQUIRED MODIFICATIONS:
Process doors can be cut out to hold up to 4 magnetron cathodes
per side, or 8 magnetrons per chamber. For sputter applications
in the 0.2 - 1 mTorr range, the center of each door could be fitted
with a 200-320mm flange dedicated to a turbo pump of 1500 - 3000lps.
TYPICAL TWO ATMOSPHERE SPUTTER PROCESS SEQUENCE (using 10 chambers):
0 - CARRIER LOAD Load Station (atmosphere)
1 - LOAD-LOCK Chamber 1
2 - BUFFER CHAMBER Chamber 2
3 - HEAT/PLASMA CLEAN Chamber 3
4 - PROCESS a Chamber 4+5
5 - BUFFER Chamber 6
6 - PROCESS b Chamber 7+8
7 - COOL/BUFFER Chamber 9
8 - UNLOAD LOCK Chamber 10
9 - CARRIER UNLOAD Unoad Station(atmosphere)
SPUTTER COATING SYSTEMS summary:
| Mfg | Model | Date In/Out | Desc | Target Sizes | Cathodes | Process Regions | Pumps | Comments |
| Alcatel/ Comptech | SP-1 | '90/'96/'98 | Small double side, used in R&D. | 375x150mm | 8 positions
Double sided | 3 | Cryo 10" | Very Easy setup,
Complete. Very low hours. |
| Balzers/ Leybold | Circulus M8-95 | '93/'96 | 8 position vertical Cluster Tool | For 95mm round substrates | 7 positions
Double sided | 8 | Turbo | Single unit + external cabinets |
| Ulvac | SH-9 | '91/*'96/'98
*Maj. Upgd | 16
magnetrons,
8 per side | 680mm | 6 - 8 positions
Double sided | 3 | Cryo /Turbo | Ready to install, w. carriers &
more, |
| Ulvac | ND-1 | '97/'99 | Excellent for thin
flat panels | 930mm | 6 - 8 positions
Double sided | 3 | Cryo / Turbo | Hardly used chaber system, can be expanded
to 1000x1000mm substrates with modifications |
| Balzers | DZA
-750V3 | '80/'93/'98 | Med Size, single
side, many upgrades | 750mm | 1-3 position Single
Sided | 1 | Diffusion | Ready to install,
single 4m long chamber plus control cabinets and mech pumps |
|
GNB/Solarex, PLD/Rohwedder Group |
12 Chamber |
Installed 1997 | Beautiful 304L chambers with 4"c 64"
pneumatic slit valves. 12 identical chambers. |
Theoretically
66"=1650mm | Theoretically,
up to 3 atmospheres and 16 sputter stations | Up to 3 | As
Desired, Turbo Suggested | Chamber
system to be upfitted with pumps and controls to suit application |
If you are considering a sputter coater with 15" to 40" targets, you are aware of the fact that the chamber systems
can cost $1- 7 million when new, and the pump packages may run as high as $4 million new. You will also be aware that the the
facility to accommodate the system will be expensive, and that the cost of installation may range from $50k to $600k.
To save you time and expense, LMDC will contribute its efforts in all ways possible to help you minimize this expense.
One of the ways we can do this is to refer technical and scientific manpower experienced with these specific systems to you.
I) ND-1 ULVAC 930mm Vertical In-Line Double Sided (36")
Sputter Deposition System 1997
30mm interchamber valves. Double Sided Sputter Coating System for 930mm x 930mm pallets (or longer, with modifications):
This system of chambers has characteristics very similar to those of S-12, below,
because it was designed for exactly the same task,
but with longer cathodes (930mm vs 600+mm) and
larger capacity load-lock pump systems for greater production rates:
A major structural difference is that the door valves between chambers are 30mm wide
in order to enhance isolation between chambers and processing stations,
however this does restrict the size of substrates you may process.
* TECHNOLOGY TRANSFER:
* Need Process Consulting ? Feasability Information ?
* Not sure if the equipment on this web page will do the job you require ?
* Want a Smooth Installation? - Professional PhD Trained Scientists and Engineers available to direct and train your team. Please inquire for pricing and details of scheduling and availability.
MECHANICAL DRAWING PACKAGE Set of 22"x34" Drawings supplied by Ulvac. $100, delivered.
* Cathodes: Eight RF cathodes, networks and 10Kw supplies included. Images: (1), (2), (3)
* Transport Mechanism: Rack and Pinion
* Pumps: Cryo Pumps and optional polyCold coils.
* Power Required = 200KVA
* Facilities Footprint is 7m wide, 3.5m high, 26m long.
* All Documentation and HISTORY included.
* Replacement Cost IN 1997 = approx. $7million (+ $2 million for pumps and electronics)
III) Alcatel-Comptech 375mm (15") Model SP-1
In-Line Double Sided Sputter Deposition System 1990
Process Stations:
* RF Etch (1250watts) (1),
* RF Sputter (2500watts) (4 Double Side),
* DC Sputter (5000watts) (1 Double Side), and Slit
Valve Width of 100mm
This "little" system is a gem ! Similar in pumping and process design to the
"Big Brother" Ulvacs listed above, it is small enough
to be handled like a laboratory system, but it can produce big
results on substrates as wide as 15" while at installation
and ownership costs far lower than that of the larger machines.
It is fully maintainable - all parts save the chamber are
off-the-shelf. (eg: VAT slit and throttle valves, AE power
supplies, and catalogue mechanical parts)You will not have
to depend on Alcatel for spares of any kind. Original fab drawings
and engineering expertise are maintained by Meivac, inc., in Santa
Clara, CA, as well as other engineers and techs who are quite
familiar with installation and operation of this system.
* PALLETS: 350mm (14") wide.
* PALLET TRANSPORT Mechanism is Rack
& Pinion Drive for maxium versatility.
* PUMPING by Six CT10
Cryo Pumps (including compressors)
+ Alcatel 2063+RSV600
Mechanical Pump Stacks at Load Lock Chambers.
* CYCLE TIME =
3 - 20 minutes per pallet, set by transport speed.
* CHAMBERS:
VALVE 1 - VAT 100mmSlit Valve - 1
01 - LOAD-LOCK / HEATER Chamber
VALVE 2 - VAT 100mmSlit Valve - 2
02 - RF PLASMA ETCH Chamber
VALVE 3 - VAT 100mmSlit Valve - 3
03 - DEPOSITION Chamber 1
04 - DEPOSITION Chamber 2
- isolation slit -
05 - DEPOSITION Chamber 3
VALVE 4 - isolation slit -
06 - DEPOSITION Chamber 4
07 - DEPOSITION Chamber 5
11 - BUFFER / COOLING Chamber
VALVE 5 - VAT 100mmSlit Valve - 4
12 - UNLOAD-LOCK Chamber
VALVE 6 - VAT 100mmSlit Valve - 5
* CATHODES INCLUDED: DC magnetron (2), RF diode (10)
* POWER SUPPLIES INCLUDED: DC) MDX-5K (2), RF) RFX-3000 (2), RFX-2500 (6)
* Spares Inventory, with extra pumps, Backing Plates, and Pallets.
* FACILITIES FOOTPRINT is 22' wide, 14' high, 50' long.
* DOCUMENTATION and DRAWINGS included.
* HISTORY - Installed 1990, used only in R&D process development.
* PROFESSIONALLY DE-INSTALLED.
* IMAGE GALLERY: Chambers A, B, C, D, E, Controller Electronics: 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, Fixtures,
* TECHNOLOGY TRANSFER:
* Need Process Consulting ? Feasability Information ?
* Not sure if the equipment on this web page will do the job you require ?
* Want a Smooth Installation? - Professional PhD Trained Scientists and Engineers available to direct and train your team. Please inquire for pricing and details of scheduling and availability.
Would you like to see a MECHANICAL DRAWING PACKAGE ?
Set of 22"x34" Drawings and Operator's supplied by Alcatel. $100, delivered.
CPA/Kurdex V2000 (Refurbished in 2000) - Four process regions or chambers.
Eight
IV) Balzers DZA-750V3
Vertical In-Line, (up to 3 target) Single-Side Pass-Through Sputter system.
Diffusion pumped. Serial # BSS02251/102.
MECHANICAL & WORKFLOW LAYOUT:
LOAD STATION: For queuing pallets for introduction into load chamber.
LOAD CHAMBER: Water Cooled, with VAT 150mm wide slit valves.
PROCESS CHAMBER: Two DC magnetrons installed + Space for third unit.
UNLOAD CHAMBER: Water Cooled, with VAT 150mm wide slit valves.
UNLOAD STATION: For substrate removal and pallets to return to load area.
DEPOSITION:
MAGNETRONS: Two DC Magnetrons, and MDX supplies provided
(Space in process chamber for a third magnetron.
TARGETS: Target size is 24" x 4" (600x100 mm)
SUBSTRATE PALETS: Substrate Pallet size is 27" x 27"
VACUUM COMPONENTS
Slit valves: Four units by VAT, approximately 750x150mm, Pneumatic., 2 at each load/unload chamber
Mechanical Pumps: Two Leybold D90A+WAP500, one on load-lock on each end.
Diffusion pumps: Three Balzers DFA320
Turbo: TPH 060 Pump, with TCP 121 Control,
MFCs: and controls.
RGA: Recently installed Spectra Multi-Quad RGA
ELECTRONICS:
INDUSTRIAL COMPUTER: Mitac MCH-214 with EMC111 Microcomputer + ESS 111 Tape Subsystem + EDT 101 Display Terminal
INLINE VACUUM CONTROLLER: IVC 101
VALVE CONTROL SYSTEMS: (6) RVG 040
GAGES: (3) PKG 100 Pirini Cold Cathode Gauge Controls,
IMG 060B Log/Lin Ion Gauge Control,
TPG 100 Multi Pirani Meter,
RTA 101 Rate/Time Adder,
(3) NLC 102B Nitrogen Level Controls,
ERE 101 Controller
MCU 110 Magnetron Control Unit,
GENERAL:
MANUALS: Complete set included.
CONDITION: - Lightly used, "Sparkly Clean". Complete, basically turn-key, except for facilities and set-up.
AGE: - Approximately ten years since installation.
DESIGN APPLICATION: DC sputter ITO on glass flat panel substrate
THROUGHPUT: 20-30 Pallets/Hour
6" Roll to Roll Vacuum Deposition System
(E-Beam or Sputter): IDEAL FOR RESEARCH !
ROLLER TRANSPORT SYSTEM: (End-On View), (Side View), (Rear View), (Drive Mechanism)
The Eight Rollers are each 6.675" long by 3" in diameter.
Two have encoders or tachometers.
Two are idlers,
Two are driven take-up and supply reels with removable cores.
One set for tensioning, and is driven
DOUBLE-SIDED DEPOSITION SYSTEM: (see Source2 backing plate)
The deposition sources, on closer inspection, look more like RF diode sputter backing plates,
and as you can see, there are two coax semi-rigid cables to them.
CHAMBER:
Interior is about 28" high x 26" wide, SS, water-cooled, with O-ring seal. (image)
Three 6" viewports with 4" clear apertures.
Throttling gate valve in base, followed by cryo.
PUMPS: Leybold RPK1500 8' Cryo Pump (photo image), Leybold D30 Mechanical Pump
COLLAR: 1" ports in 16 positions, plus the three DC servo motor drive shaft sealed coupling ports. (image)
HOIST: Torr-Vac Model 500 motor hoist with Electronic Controls.
INSTRUMENTATION: (Image a, image b, image c)
Inficon XTC Deposition Monitor
GP Model 280 Ion Tube Vacuum Gage,
Barber Coleman 590 Controller (photo image)
SUBSTRATES: Any 4-6" width material on rolls - Mylar, Cloth, Foils.
HOIST: Torr-Vac Model 500 motor hoist with Electronic Controls. (image)
INTERLOCK & CONTROLS: Torr-Vac
FOOTPRINT OF SYSTEM: 3' x 5'
PRICING: $ 49K System as-is (no e-beam or other source),
or REQUEST A QUOTATION Rebuilt, guaranteed operational, E-beam or Sputter, and Cryo or Turbo.
VACUUM CHAMBERS & OVENS:
Two Exceptional Large Rectangular Vacuum Chambers
* Impeccible Qulity, All 304 ElectroPolished Stainless Construction throughout.
* Manufactured by Ulvac in Japan * Includes PolyCold fast cycle coils on interior wall.
* Thermally Insulated on all sides and doors
* Water Coils On all sides and Doors for cooling or heating
* Clad with Hi-Polish, Attractive ElectroPolished Stainless Skin
* Many Viewports * On Stands for convenient working height.
* Sliding Door on EACH End. Convenient for pass-through processes.
Chamber 1: Interior = 132" deep x 35" wide x 44.5" tall (actual not "nominal") Volume = 119 ft3, 206K in3, 3.37m3 3 units Price on request
Chamber 2: Interior = 94.5" deep x 41" wide x 64" tall (actual, not "nominal") Volume = 143 ft3, 248K in3, 4.05m3 1 unit Price on request
"One-Half" Chamber: As can be clearly seen, these beautiful chambers are generally symmetrical about the middle.
As a consequence it is both technically and aesthetically reasonable to "blank-off" each of the two halves to create "half long" versions of Chamber 1
listed above. Specifically, 66" deep x 35" wide x 44.5" tall, and with one door only.
More information, including images ( A, B, C, ) will be posted as it is gathered.
We are very impressed by such beautiful work ! Chambers include ceilng ports for ASA-10" Cryo Pumps !
Applications include Freeze-Drying in GMP pharmaceutical applications (Lyophilization), Evaporative coating of large objects.
HV storage, testing and solar simlation of deep space.
Morrow Tech Industries, Inc.
Model 140 Portable Vacuum Bake Ovens
15" x 15" x 20" chamber, Pumps to 10-6 torr , Scarcely used,
Portable: (Move the oven, not the product.)
Applications: Freeze Drying, Desiccating, Outgassing, Super Cleaning, Annealing
Specification and Description
SS Chamber with hinged front door: 15" x 15" x 20"
Leybold Model D16 12 CFM Mechanical pump,
Leybold Model TP150 Turbo Pump: 10-6 torr
Both Cold Cathode and Pirani sensors, Dual Internal heaters: 250C
Controlled backfill capability
208/30A/60Hz/Single Phase (!!) Just "plug me in"
new cost (1995) = $62K , Our price = $15K
Stainless Steel Water Cooled Bell Jar
18D" x 28H" interior, viewport and other openings
Pyrex Bell Jar and 15 port Collar
18D" x 24H" Belljar image, Collar image Used, Good $795
Comptech (Alcatel) High Vacuum Process Oven
Designed for Ultra-Clean processing and bakeout of long tubes.
(laser, rf, and other electron beam tubes of all types)
Unique opportunity to purchase this $100,000 plus chamber system in excellent condition.
(just the stainless chambers - including nothing else - cost more than this to fabricate)
Laser, RF, and Electron Beam Tube Vacuum Processing dual chamber bakeout oven:
For Tubes, Accelerators, etc. up to 88" long x 10" dia. (up to 8 tubes at a time in each chamber)
Exterior length is 7'5"
8 separate UHV fittings & flanges for backfill and oven.
Evacuated Oven: prevents oxidizing thin wall seals.
Vacuum Oven Bakeout up to 450 C.
Horizontal Clamshell Design for very easy handling.
No hoists or high ceilings required.
All Stainless construction. Beautifully welded. Just add Sorption, Cryo,
Turbo and roughing pumps.
Dual Chambers: Process up to 16 tubes simultaneously.
If you process longish tubes, this is a tremendous money-saver and a "must- purchase"
(photo image)
VACUUM PUMPS
WARRANTY: Rebuilt pumps have had all seals and wearing parts replaced
by experienced technicians, and are tested to meet specifications.
For Non-Corrosive service, Pumps are guaranteed for 120
days after delivery.
For Corrosive service, with process contamination,
(Smell can be a clue) Pumps are warrantied for 30 days.
All warranties are for refund or replacement at LMDC's
discretion.
Our Goal = Satisfied Users !
DRY PUMPS: ("S" = Prepared for corrosive gas service)
00 Edwards ESDP30A Scroll Pump 30m3/hr (17cfm) to 15microns
01 Leybold M100S(corrosive gas)Dry Pump,100m3/hr.($39K)unused
02 Leybold M 50S Dry Pump, 50m3/hr.($27K)unused
03 Ebara 50X20UERR Serial # FK235331/3 127CFM, 4mTorr
04 Ebara 40X20UERR Serial # DPA 924569 42CFM, 30mTorr
05 Edwars QDP 80 w/ QMB500 on frame with control box - Just in!!
DRY PUMP STACKS:
01 Edwards EH1200 on EDP300, water cooled, beautiful !
02 Leybold WSU151 on M50S, unused 153 into 50 M3/hr
03 Alcatel DRYTEL MICRO Turbo (rebuilt) on Dry Mechanical pump
WET PUMP STACKS:
01 Balzers DUO250 + WKP1000 Stack, 1000m3/hr., used, maintained
in spares inventory for very large sputter system. $17.9K
02 Edwards E1M275 + EH1200 Stack $14.9K
04 Leybold E250 + WAU1001US Stack $18.8K
WET PUMPS:
03 Edwards E1M275 $ 8000
03 Edwards E2M175 $ 6000
04 Edwards E2M40 $ 2500
05 Leybold E250 250m3/hr (150cfm) to 20 microns 2) $ 9900
06 Leybold E150 150m3/hr (100cfm) to 0.20micron 1) $ 4900
07 Leybold D40BCS + filter acces, Fomb ,Rebuilt, Guar. $ 3900
08 Leybold D30AC Rebuilt. Guar. $ 1500
09 Leybold D8A Rebuilt. Guar. $ 1100
10 Welch 1398 51CFM, dual stage, 1 micron/3HP/3ph, rebuilt $ 3400
OILLESS PUMPS:
01 Busch RC0063C, 41CFM, 15torr
02 Busch RC0063E, 41CFM, 15torr
ROOTES BLOWERS:
01 Edwards EH2600 Rootes, 1200ft3/sec, Fomblin, Rebuilt and Guar. $ 9800
01 Edwards EH1200 Rootes, 1200ft3/sec, Fomblin, Rebuilt and Guar. $ 6600
02 Leybold WAU1001US Rootes Blower, $ 4900
02 Leybold WSU151 Rootes Blower, Fomblin, Rebuilt and Guaranteed $ 3500
Mass Spectrometers:
Pfeiffer Vacuum - OMISTAR Type GSD 300 01 - Call for more information and pricing$$
Excellent unit with low hours.
(click on images for bigger pics)
The OmniStar system has set the standard for benchtop gas analysis
and is the most popular solution to many gas analysis applications.
Key Benefits:
* Compact Bench top Unit – small footprint, transportable
* Low detection limits – detection of sub ppm concentrations
(gas dependent)
* Fast response time – continuous, real time analysis
* Mass range 1-100, 1-200 or 1-300 amu
* Dry pumping system – no messy oil changes
* Integrated total pressure gauge – for filament protection
and diagnostics
* Heated inlet system – prevents condensation
* Integral bakeout jacket – low backgrounds
* 64 Measurement channels – monitoring of many
different gasses simultaneously
Applications
* Temperature Programmed Desorption/Reduction/Oxidation
* Vacuum/Freeze Drying
* Gas abatement monitoring
* Gas purity/gas mixture monitoring
* Fermentation
* Breath gas analysis
Industries
* Automotive
* Fuel Cell
* Catalysts
* Pharmaceutical
* Medical
* Laser/Lamp Production
* Gas Suppliers
TURBO PUMPS and CONTROLS:
| Speed |
Mfg
| Model | Bearings | Service | Controller | Inlet | Outlet | Features | Condition | Qty | Price |
|
150 L/S | Alcatel | 5150 | Mech | | Incl. | | | | Like New | 1 | $3.9K |
|
330 L/S | Balzers |
TPH330
| Mech | | | | | | Unused | | $6.5K |
|
300L/S | Pfeiffer |
TPH 521
| Mech | | | | | | New $CALL |
Control | Pfeiffer | | | | TCP 350 | | | | New | | $CALL |
|
150 L/S | Leybold |
TMP 150
| Mech | | none | ISO | | | | | |
|
360 L/S | Leybold |
TMP 360
| Mech | | none | ISO | | | Rebuilt | | |
|
1500 L/S | Leybold |
TMP1500
| Mech | | none | | | | New | | $12.9K |
|
1500 L/S | Leybold |
TMP1500
| Ceram | | none | | | | Rebuilt | | $12.5K |
|
3200 L/S | Osaka |
TP3213M
| MAGNETIC
Long Life | Chem | Incl. | ISO320 | KF40 | Hybrid | Unused in mfg. crates | 2 | $44.5K |
|
2000 L/S | Osaka |
TP2003M
| MAGNETIC
Long Life | Chem | Incl. | ISO250 | KF40 | Hybrid | Used, low hours, guaranteed | 10 | $15.9K |
|
1300 L/S | Osaka |
TG1300M
| Mech | | | | | Hybrid | Used | | $7.9K |
|
550 L/S | Osaka |
TG550M
| Mech | | | | | Hybrid | Rebuilt | 1 | $8.8K |
|
3000 L/S | Shimadzu |
TMP3003LM
| MAGNETIC
Long Life | Chem | Incl. | ISO320 | | | Used, lfactory rebuild, guaran. | 4 | $29.9K |
| | | | | | | | | | | | |
01 Alcatel 5150 CP Pump, + Control Unused
03 Pfeiffer TPH 521/TCP 350 Pump + Control ISO 100 flange, New
04 Leybold TMP1500 Pump, rebuilt, ceramic, ISO250
05 Leybold TMP1500 Pump, UNUSED + Used Controller
06 Leybold TMP 360 Pump, rebuilt, ceramic, UHV + Controller
07 Leybold TMP 150 Pump rebuilt, ceramic, UHV + Controller
07a Leybold TMP 151 Used, Ceramic
08 Leybold TMP 50 Pump rebuilt, fan, UHV flange.
09 OSAKA TP3213M Maglev Wide Range (from 2 torr) Pump KF40/ISO320
+ Control & Cable (NEW in original manuf. crate)
11 OSAKA TG2003M Maglev Wide Range (from 2 torr) Pump,
12 bolt ISO250 flange + TD2001 Control, 30'Cable, used, "EX+" (long lived pump!)
12 OSAKA TG1300 Wide Range (from 2 torr) Pump
13 OSAKA TG 553 Wide Range (from 2 torr) Turbo Pump, rebuilt
14 SHIMADZU TMP-3003LM Pump + Control MagLev 3000L/S, 2 month old Japan
Factory bearing upgrade and complete rebuild. Just as new (4)
15 VARIAN V200 Turbo Pump + Control
16 VARIAN TV551/ISO160 Turbo Pump + Turbo-V 550 Controller
CRYO PUMPS, COMPRESSORS, POLYCOLD REFRIGERATORS & LINES:
00 POLYCOLD PFC1100 LT, low hours, Excellent !
00 POLYCOLD FI-5A Refrigerator
00 POLYCOLD PGC-150 Gas Chiller
01 APD Model 12SC Pump (interchanges with CT-10)
With 10" ASA flanges, this pump is a drop-in replacement for tired CT-10's.
ASA-10"flange, 3200 lps for air, 5200 lps for H2,
03 APD Model HC-8C1 High Capacity Helium Compressors.
Water cooled, compact, for one APD-12, one CT-10, or three CT-8's or equivalents.
220V/12.5A./3phase 50/60, 1.5gpm/30psi/40-70F cooling water for 17,500 BTU/hour.
Remote Control, internal safety bypass valve, reversed phase protection.
200lbs. 20" tall, 17" wide, 19" deep, on casters, with line cords.
05 Flexible Helium Lines. 10' length, guaranteed
06 Flexible Helium Lines. 20' length, guaranteed
*A note about APD products: In our experience, Helix / CTI makes excellent cryo systems,
and we are aware of the brand-name dominance acheived by CTI's rapid turn-around service
in the current vacuum equipment marketplace.
* With this in mind, and with great care, we questioned the experiences of users in a large
manufacturing company using about 200 cryo pumps in production. They have a mix of
about 25% CTI pumps, and 75% APD Cryo Pumps. Technicians as well as Maintenance and Process
Engineers stated without hesitation their opinions that the APD pumps and compressors performed
over the long haul: "BETTER - more reliably, with less down-time and faster pump speeds - than
the equivalent CTI systems". These opinions may result from "cognative dissonance", excellent
PM procedures, or perhaps they are scientifically accurate. Please draw your own conclusions.
* If it is service you need - - our APD pumps are priced low enough to
buy an extra for on-site spares, and STILL be ahead of the game, financially speaking !!
06a CTI On Board 8F
07 CTI CT-8 ASA
08 CTI CT-8 ISO
08a CTI On Board 8F
09 CTI CT-10
10 CTI 1020R Compressor
11 CTI 8500 Compressor
12 CTI 8510 Compressor (for onboard pumps)
12a CTI 9600 Compressor
13 Leybold RW3 Compressor
14 Ebarra 4.8 Compressor: For up three CT8, or one CT10/APD-12SC
*uses Hitachi compressor module, as does CTI
15 Ebarra 12" Cryo Pump, used, ASA
16 Ebarra 8" Cryo Pump, used, ASA
17 Ebarra 4" Cryo Pump, used, ASA
ION PUMPS and POWER SUPPLIES:
01 Supply - Varian "Star-Cell" Ctl/Pwr Unit Model 929-0081 (unused)
02 Supply - Varian / Duniway 921-0062 power supply cable
03 Pump - Ultek 600lps, 12" conflat flange, magnets included
04 Supply - Ultek Digitel 500
SORBTION PUMPS:
01 Varian Megasorb 931-5012 MODE = "Bake" / "Auto" / "Manual" Pneumatic Valves.
"BAKEOUT CONTROL", "BAKEOUT TIMER", "AUTO CONTROL".
This is THE very large unit mounted on wheels.
The stainless LN2 Canister is itself 15" in diameter, 33" tall.
Includes LN2 Controller, Air pressure regulator and all Varian controls.
DIFFUSION PUMP SYSTEMS:
01 Edwards small UHV Pump Stack: Edwards UHV Pump Station,
DIFFUSION PUMP = Diffstak model 63 (450W 115VAC)
MECHANICAL PUMP = EDM5 (115/230)
GAGES = Pirani PRM10 (2)
= Penning PENCP25-X D145-37-000 (1)
GAGE CONTROLLER = Edwards model 1005
Manual Controls (see photo) "unused" warranty
VACUUM VALVES
POPPET VALVES:
40mm Varian model NW-40,Right Angle KF40 flange, pneumatic poppet valves. Clean, good condition
30mm Leybold 29721, Right Angle KF30 flange, pneumatic poppet valves. Clean, good condition
SLIT VALVES:
VAT F02/03 Series for 12" wafers and flat panels Aperture: 335x32mm / (13 3/16"x 1 5/16"), Body: 90x115x410mm/ 4.5"x 16.125"x 3.5" These are top of the line valves with replacable seals, bi-directional sealing to 1.2bar, for load-lock or interchamber applications, designed for systems working down to the lowest of O-ring pressure levels (approx. 10-6) ( Front ) ( Rear ) ( Top ) - limited quantity
GATE VALVES:
01) ASA 12" HVA 11000 series 12" pneumatic Gate Valve - used -
All Stainless Construction (Fits CT-10 and APD-12 Cryo pumps).
VAT F64 Series Servo-Controlled Gate/Throttle Valves - All Stainless, beautiful !
F64 series valves are designed to be used open, closed, or servo positioned to any point in between.
deal to either throttle or isolate pumps such as cryos and turbos for process control in plasma, sputter
or any system requiring pressure or flow control.
(Supplied with Pneumatic drive, unless step-motor is substituted with PM5 controller option)
02) DN200MM ISO-F (100 units) F64 series gate/ throttle valve
03) DN250MM ISO-F (030 units) F64 series gate/ throttle valve
04) (300mm) ASA10" (08 units) F64 series gate/ throttle valve (bolts to APD-12 / CT-10 Cryo)
VAT PM5 VALVE CONTROLLER
07a) VAT PM-5 Adaptive Pressure Controller for F64 Series valves.
Allows remote computer or local front panel control of your valving.
Includes Step-Motor Drive Module, and 20' cable.
Requires a cable with Burndy 12 contact round shell connectors. $2650
07b) VAT Cables for F64 Series Controllers and Valves. 20' $100, 50' $ 200
07c) Flange Adapter from 200 ISO-F to ASA-12" $ 575
Comptech / Alcatel Hi-Vacuum
"Vari-Q" Throttling Valves,
3" , 80mm, 100mm,160mm. NEW UNITS!:
For sputter systems, etc. these valves are the circular pie shaped
Venetian blind type with a 90 degree rotation 0.25" shaft.
Easily controlled remotely with a simple, low cost step-motor
system. Special Teflon coating for corrosion resistance, as in
CVD work. All are UNUSED in original manufacturer's packaging.
(photo image)
| Size |
Model |
Condition |
Qty. |
Prioce |
| 160mm |
VQ-160-ISO |
UNUSED |
40 |
$ 699/ |
| 100mm |
VQ-100-ISO |
UNUSED |
30 |
$ 699/ |
| 80mm |
VQ-
80-ISO |
UNUSED |
14 |
$ 699/ |
| 3" |
VQ- 3-ASA |
UNUSED |
9 |
$ 699/ |
| 12" |
VQ -12
-ASA |
Used |
4 |
$1300 |
DC
Magnetron Sputter and Ion source
POWER SUPPLIES
ADVANCED ENERGY "RF/DC Combiners"
model 6016-001-B This unit allows
energy from an MDX series supply ("C" twist-lock connector)
to be combined with energy from an RF supply ("N" connector)
and presented together at the output ("UHF" connector)
from which it leads to the magnetron cathode. Six units in new
condition in stock.
ADVANCED ENERGY "Pinnacle"
SERIES
DC Magnetron Power Supplies
The "Pinnacle" is the most
recent evolution of the AE DC Magnetron Supplies. Major advantage
is the low, low stored energy which is discharged into the substrate
when arcs take place. Arc energy in the Pinnacle is approximately
two orders of magnitude less than MDX amd MDX-L series. Like with
the MDX-L series, you get 12-18kW per small 7" high, 19"
rack mount unit. In a 6' high rack cabinet, you can mount 8 units
for a conservative total of 96kW with the popular 12kW units.
° Low stored energy
° wide impedance range with no taps
° compact design
° extensive arc management capability
° flexible interfacing
° high ripple frequency
° CE compliant.
° Magnetron sputtering, DC biasing, Reactive sputtering
Dual Output Pinnacle Supplies: Model MN3152412-106. Refurbed $12K/ea.
ADVANCED ENERGY "MDX" SERIES DC Magnetron Power Supplies
° world's most flexible and popular DC supply ! Independently Control DC CURRENT, VOLTAGE, or POWER
° INPUT = Y or Delta 208 V ±10%, 3 phase, 50/60 Hz,
° Microprocessor Control, Arc Suppression,
° USED, TESTED, GUARANTEED !
1) AE MDX-10K 10KW (Blank front panel) $ 6750
2) AE MDX- 5K 5KW (Blank front panel) $ 2950
3) AE MDX-5000 5KW (Master with full front panel) $ 4350
4) AE MDX- 500 500W (Master with full front panel) $ 1590
ADVANCED ENERGY "MDX-L" SERIES DC Magnetron Power Supplies
USED - TESTED BEFORE SHIPMENT - GUARANTEED
- world's most flexible and popular DC supply ! A redesigned and updated version of
the venerable and popular MDX, which has become the industry standard.
° Lower stored energy for arc suppression than original "MDX".
° The MDX-L series of supplies is extremely easy to use and lowest in cost .
° All that is required is analog input control signals 0-10VDC
to control output POWER, VOLTAGE, or CURRENT. Likewise,
° three buffered precision analog outputs (0-10VDC) "POWER" , "VOLTAGE", and "CURRENT" in real time.
° Use $30 DC Digital Panel Meters and inexpensive "volume control" potentiometers for full control and status display.
° Use low cost DAC and ADC boards in a single PC to control your entire system.
° Attach up to two slaves to each master with one cable each for power up to 54kW.
° USED, TESTED, GUARANTEED ! QUANTITIES AVAILABLE !
Input Power: 200-208vac 50/60Hz, "Y" or Delta (no neutral connection required).
L-6 = 25A. L-12 = 50A, L-18 = 75A (per phase leg)
Power factor = 0.9 for output power 10-100% of maximum
L-6 L-12 L-12/650 L-18 Control
CURRENT 0-15A 0-30A 0-24A 0-45A 0-10VDC
VOLTAGE(-) 0-525V 0-525V 0-650V 0-600V 0-10VDC
POWER 0-6kW 0-12kW 0-12kW 0-18kW 0-10VDC
Regulation: 0.2% from 10 to 100% of output range.
Repeatability: 0.2% from 10 to 100% of output range.
Power Accuracy: 1% of setpoint or 12/24/36W, whichever is greater.
Voltage Accuracy: 1% of setpoint or 2V, whichever is greater.
Variable Ramp-Up: 50 - 1000 ms with 0-10VDC control input.
Output Connector: UHF (RG8 cable recommended)
Voltage Ripple: 5% rms, maximum.
Ignition Voltage: 1500V / 60ma
Arc Shutdown: 8ms
MDX-L SUPPLIES -TESTED BEFORE SHIPMENT - GUARANTEED
model description price qty "as-is" price
1) AE MDX-L 6 6KW Stand-alone/Slave $ 2300 ( 4) $ 700
2) AE MDX-L12 12KW Stand-alone/Slave $ 3800 (20) $ 900
3) AE MDX-L12M 12KW Master $ 4400 (0) $1250 (OUT OF STOCK)
4) AE MDX-L12-650 12KW S-A/Slave 650V out $ 3900 ( 6) $ 950
5) AE MDX-L12M-650 12KW Master 650V out $ 4900 (0) $1250 (OUT OF STOCK)
6) AE MDX-L18M 18KW Master $ 6900 ( 8) $2000
7) MASTER to SLAVE CABLE SET (one per slave) $ 125 na
ENI DCG series - DC Magnetron Power Supplies
HIGH RESOLUTION CONTROL OF POWER, VOLTAGE AND CURRENT
6) ENI DCG-100 5KW (front panel - full controls) $ 4900
7) ENI DCG-100 5KW (front panel - blank ) $ 3900
8) ENI DCG-100 10KW (front panel - full controls) $ 7900
9) ENI DCG-100 10KW (front panel - blank ) $ 5900
10) ENI DCG-200 20KW Master(front panel - blank ) $ 9900
11) ENI DCG-200 20KW Slave (front panel - blank ) $ 7900
AC/RF Sputter/Plasma
POWER SUPPLIES & MATCH NETWORKS:
| MFG | Model | Freq | Power | Details | OUR PRICE |
| | | | | | |
| AE |
PE-5000
|
40KHz |
5.0kW |
600VrmsAC/10A |
$ 4,700 |
| AE |
Vista 10K |
13.58MHz |
10kW | Vista
is the latest model - highest power density | |
| AE |
Vista
5500 |
1 3.58MHz |
5.5kW | | |
| AE |
RFPG-5500 |
13.58MHz |
5.5kW |
Unused in factory crate |
$ 9,500 |
| AE |
RFX-5500 |
13.58MHz |
5.5kW |
Highly automated electronics for precision |
$13,800 |
| AE |
RFX-3000 |
13.58MHz |
3.0kW |
Highly automated electronics for precision |
$ 7,250 |
| COMDEL |
CX-2500 |
3.39MHz |
2.5kW |
Complete, Unused in factory crate |
$ 4,750 |
| COMDEL |
HX-15k |
13.58MHz | 15000W | | |
| COMDEL |
CX-5000 |
13.58MHz |
5.0kW |
Complete, Unused in factory crate |
$ 9,500 |
| COMDEL |
CX-5000 |
13.58MHz |
5.0kW |
RF unit only. Used, Guar. Req 35-55VDC/200A
DC supply. Generally, Comdel supplies are "bulletproof". |
$4,150 |
| COMDEL |
CX-5000S |
13.58MHz |
5.0kW |
RF unit only. Used, Guar. Req 35-55VDC/200A
DC.
"S" = later rev., higher VSWR tolerance.
Note: CX5000 in low duty factor mode for peak powers as
high as 9000 wattts, |
$5,500 |
| COMDEL |
CX-5000S |
13.58MHz |
5.0kW |
Complete Factory Refurbished RF + DC
power supply |
$12.500 |
|
ENI |
Plasma-Loc3G
|
25-125KHz |
3000W |
Unused |
$7,500 |
|---|
|
ENI | Plasma-Loc3G |
25-125KHz |
3000W |
Used |
$3,350 |
|
ENI | GENESIS | | |
Used | |
|
ENI | OEM50 |
13.58MHz |
5000W | | |
|
ENI | OEM25XL |
13.58MHz |
2500W |
Used |
$3,900 |
|
ENI | OEM12A |
13.58MHz |
1250W | | |
|
ENI | OEM6B |
13.58MHz |
1000W | | |
|
ENI | OEM6A |
13.58MHz |
600W | | |
|
ENI | HF-1 |
13.58MHz |
1000W |
Used, Brute force, high-VSWR tolerant |
$750 |
| RFPP | RF30H |
13.58MHz |
3000W |
"H" model withstands higher
reflected power |
$6,900 |
| RFPP/AE | Custom
Pkg |
13.58MHz |
(3000W) |
Inductive Plasma MATCH NETWORK for RF30H |
$1,900 |
| RFPP | RF25M |
3.8 - 4.2MHz |
2500W |
Mid-range RF Supply |
$3,900 |
| RFPP/AE | Custom
Pkg |
3.8 - 4.2MHz |
(2500W) |
MATCH NETWORK for MF25 |
$2,200 |
| RFPP | HFS
10,000 |
13.58MHz |
10kW |
Vacuum Tube larger unit. Durable Animal ! |
$11,000 |
| RFPP | AMN
10,000 |
13.58MHz |
(10kW) |
MATCH NETWORK for HFS10000 |
$5,500 |
Save 50% - HIGHEST Quality
RG217/U Co-Ax Cables for RF and DC Magnetron Sputter Supplies
With TruConnector quick disconnect connectiors
These are the super-premium RF interconnect
cables demanded by the semicunductor industry. Because
of fires and poor performance caused by incompletely connected
cables in high power systems, Applied Materials called upon TruConnector
to design a completely new series similar in design to quick-disconnect high pressure air connectors.
These state-of-the-art cables are the result. There
are two states: "CONNECTED" and everything else. RG-217/U
Typical NEW Low Loss RF Power Cables - RG-217/U | Connector | Connector | Length | Quantity | Price |
|---|
| N | N | 28' | 100 | $ 49 |
|---|
| N | N | 50' | 16 | $ 69 |
|---|
| HN | HN | 100' | 6 | $129 |
|---|
| HN | HN | 50' | 16 | $ 99 |
|---|
| HN | N | 50' | 6 | $ 79 |
|---|
| HN | N | 100' | 16 | $129 |
|---|
| 7/16 | 7/16 | 100' | 4 | $179 |
|---|
| 7/16 | HN | 100' | 4 | $159 |
|---|
|
SQS |
SQS | 100' | 3 | $325 |
|---|
| SQS |
SQS | 50' | 6 | $250 |
|---|
| SQS | 7/16 | 100' | 4 | $250 |
|---|
cable Conectors length qty price
RG-217/U N - N 28' New 110 $ 49/ea
RG-217/U N - N 50' New 16 $ 69/ea
RG-217/U HN - HN 100' New 6 $129/ea
RG-217/U HN - HN 50' New 16 $ 99/ea
RG-217/U HN - N 100' New 16 $129/ea
RG-217/U HN - N 50' New 6 $ 79/ea
RG-217/U 7/16 -7/16 100' New 4 $179/ea
RG-217/U 7/16 - HN 100' New 4 $159/ea
RG-217/U SQS - SQS 100' New 3 $325/ea
RG-217/U SQS - SQS 50' New 6 $250/ea
RG-217/U SQS - 7/16 100' New 4 $250/ea
notes:
QDS = "Quick
Disconnect Series" from TRU-CONNECTOR
Electrically equivalent to "C" (bayonet) & "SC"
(screw)
SQ = "Super
Quick Series" from TRU-CONNECTOR
10kV, up to 5kW, positive mating indication.
5 kW AE/Varian DC Magnetron
Sputter Sub-System $3900 !!
(only!)
Components Manufactured by Intevac - Varian and Advanced
Energy
INCLUDES:
- Varian MDP-350 DC Magnetron
Sputter Gun, (images
1, 2, 3)
- AE MDX-5K 5000 watt DC supply:
Floating Output, Arc Suppression, Remote Control version, 208VAC
(Model 2011)
- Cables.
Just Provide Target Material and Chamber,and you are in business
for single or double sided sputtering for only $3900 per surface!
With the "kit of components" you
receive:
A) Advanced Energy MDX 5K 5kw DC magnetron supply configured for remote
control. This is a used unit removed from operational sputter
systems from a company which went out of business. 34 available.
View specs at: http://www.advanced-energy.com/call/call13.html
B) Advanced two-coil design Intevac/Varian MDP-350 Magnetron Sputter
Gun, used, removed from operational systems (no target
material included). Designed to mount on the OUTSIDE of the chamber,
and can be utilized in opposing pairs mounted on small diameter
rectangular chambers for double sided coating of substrates. Originally
used for Hard Disk Coating with Ta, Cr, Ni, Pt, Carbon, and other.
The design of this Magnetron acheived two goals by modulation
of the magnetic fields:
i) to optimize coating uniformity on the substrate, and
ii) to increase the total percentage of the target material utilized
For more cathode info, view: http://www.tsmd.com/tsprod/tspinte.html
Why the dual coils ?
Ans: To allow the geometry of the magnetic field to be continuously
varied, with the result that the material of the target is more
efficently and uniformly consumed.
C) Cables, approximately
20 feet long, to connect MDX-5K to the sputter Gun.
OPTIONAL CHAMBER: (as shown in images 1 & 2). Ideal
for utilizing 1 - 4 gun assemblies to coat planar substrates.
If you purchase 4 subsystems, it is free. With fewer, the price
is $299.
CONDITION: Used.
NOTE: The Purchasor is responsible
for all modifications and upgrades. These are used units which,
if purchased new, would cost more than $25k, each set.
The MDX supply
is a "no front panel" unit and requires remote
control via alalog signals or via RS-232 control signals. However,
you can provide to set voltage, current, and so on. AE supplies
an off-the-shelf control interface unit. Also can be easily interfaced
to your personal computer. Also required is a source of DC coil
current of about 7A, max. and a switching arrangement to vary
it between the coils if you wish to utilize that feature. Supply
and gun require water for cooling.
PRICE = $3900 FOB Union
City, CA Shipping weight = 195#
Veeco Type SDM Ion-Beam Source
Gun $3395
A traditional high-end gun for research (view front,
rear, side)
Cathode Heater 4V at 30A = 120 watts
Total Beam Current 20 - 300 microamps
Energy Dispersion Less Than 40 eV
Phase space Surface at 10KeV: less than 10-4 rad.m.
Half Angle Divergence 0.02 radian
He Gas Flow: 5 x 10-3 torr l/sec
Max Power: 1.5kW
PRICE = $3395
VACUUM INSTRUMENTATION & GAGES
THERMOCOUPLE Veeco TG70 Controller With Sensor, USED, GUAR. $395
MKS BARATRON 625A-13547 10.0Torr KF Flange Transducer + 2 trip points USED, GUAR. $970
±15 VDC power supply 0-10 VDC output D-15 Connector
MKS BARATRON 627A-13258 0.02Torr KF Flange Transducer USED, GUAR. $990
±15 VDC power supply 0-10 VDC output D-15 Connector
Granville-Phillips Model 316 Gage Controller set up, with three cables,
for Convectron Gages, UNUSED $1150
MKS Model 651-CD2S1N Throttle Valve Controller - NEW - $950
NEW MASS FLOW CONTROLLERS
@ GREAT PRICES
For notes, theory and applications assistance - in
other words,
for a great short course on MFC's, go to: http://www.unit.com/solution.html
| Flow |
Gas,
nominal |
Gas
Constant |
MFG |
MODEL |
Condition |
Qty |
Price |
|
| 10 SCCM |
N2 |
1.000 |
Aera |
FC770AC |
New |
10 |
$495 |
|
| 100
SCCM |
H2 |
1.010 |
Aera |
FC770AC |
New |
20 |
$495 |
|
| 300
SCCM |
Ar |
1.420 |
Aera |
FC770AC |
New |
2 |
$495 |
|
| 500
SCCM |
Ar |
1.420 |
Aera |
FC770AC |
New |
20 |
$495 |
|
|
150 SCCM |
Ar |
1.420 |
Tylan |
FC-2951 |
New |
16 |
$595 |
Metal-Ceramic seals |
|
40 SCCM |
N2 |
1.000 |
Tylan |
FC-2900 |
Used/Working |
100 |
$119 |
Removed from working, decomissioned
systems. Include Connectors. "as-is" |
QTY MFG MODEL RANGE CAL. RATIO PRICE
4 STEC SEC-4400MC-UC 2 SLM Ar 1.420 $ 699
4 STEC SEC-4400MC-UC 20 SCCM SiH4 0.600 $ 599 (photo)
7 UNIT UFC-1000HP 200 SCCM CCl4 0.306 $ 499
1 UNIT UFC-1020 20 SCCM O2 0.981 $ 499
1 UNIT UFC-1020 50 SCCM O2 0.981 $ 499
Applied Materials Spare parts and assemblies. Please call for price and availability.
Centura/Endura Robot Upper/Lower Assy.
0010-70149
0010-70317
0010-70264
0010-75533
0010-01711
0010-76061
0010-70265
0010-40310
Misc Appied Part Numbers
0190-77181
0090-77000
0090-77001
0090-77007
0010-01191
0150-35746
0190-35961
0190-00220
0190-35780
P5000 RF Match
0010-20524
Various Vacuum Links:
AE: Advanced Energy http://www.advanced-energy.com
Busch: http://www.buschpump.com/vacuum_products.html , http://www.buschpump.com/r5_principles.html
Leybold: http://www.leyboldvac.de/semi_01.html ,
Edwards: http://www.edwards.boc.com/ ,
Balzers http://www.pfeiffer-vacuum.com ,
Alcatel: http://www.alcatel.com/cable/hvt/vacu-sys.htm ,
APD: http://www.apdcryogenics.com/products/mar_frm.htm ,
CTI: http://www.helixtechnology.com/ ,
Osaka: http://www.avem.org/MemDirF/Osaka.html ,
Varian: http://www.vvp.varian.com/products/index.html ,
Welch: http://www.welchvacuum.com ,
Shimadzu: http://www.shimadzu.com/products/industlev2/industlev3/tmp1.htm
LMDC 3101 Whipple
Road, Union City, CA 94587, 510-429-1060, -1065, <office@lasermotion.com>
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